Microfabrication

Mcirofabrication is both technique and art. 

In Feb. 2020, Dr. Neal Hall showed Xiaoyu around MER's cleanroom. Told the stories about how to use microfabrication to build MEMS sensors. At that time, Xiaoyu was triggered by this kind of interdisplincniry work. The tour of the cleanroom is one of the major reasons that Xiaoyu rejected PSU and went to UT. 

In Dec. 2020, Xiaoyu was first trained by Yoonho to do sputter, photolithography, and lift-off. Xiaoyu appreciated Yoonho's and Anna's help. 

In the summer of 2021, Xiaoyu individually built CMUTs in MER's cleanroom. Although the CMUTs weren't successful, Xiaoyu learned and experienced fab a lot. 

During the spring of 2023, Xiaoyu restarts the MEMS fab. Have a bunch of feelings and thoughts. Write them down for future reference. 

-- 04/05/2023 Xiaoyu Niu 

Adding Materials

Al2O3

Reducing Materials

tools



Silicon

Photoresist

Al2O3

SiO2


Others:

Measurements


Others


Xiaoyu's black wafer box

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7 SOI wafer taken from #38 box


8 SSP wafer taken from #48 box

9 Geophotonic dummy SSP wafer


10 Geophotonic wafer with SiN waveguides 


11 Geophotonic dummy SSP wafer


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23 SSP dummy wafer 170 um dia CMUTs

24 SOI wafer taken from #38 box for 170 um dia CMUTs without doping process

25 SOI wafer taken from #38 box for 170 um dia CMUTs with doping process