SU8 lift-off

SU-8 3005 lift off ** only use metal tweezer **

1. Put sample in the first Remover PG bath for 2hrs at 80 deg. C
   the  Remover PG is labeled : NMP
   Note: Use ceramic hot plate in PZT hood
   Note: Based on your pattern shapes (if you pattern has lots of openings, then you can reduce first bath time to 1 hr)

2. (optional) sonication will help to remove SU8 residues between bath changes
   * Note: You should be careful not to exceed total sonication time more than 85 s including this additional sonication time
   * Note: Our Pt/Ti electrode will peel off after 85 s total sonication time 

3. Put sample in the first Remover PG bath for 2hrs at 80 deg. C

4. Put sample in an IPA bath and rinse with IPA spraying

5. Final rinse with DI water and dry using N2 gun

by Xiaoyu Niu 08.23.2023