Oxford 100 ICP RIE

Regarding using, the biggest difference between Oxford 100 and Oxford 80 is the pump. The Oxford 100’s pump is not that well. Often the Penning gauge doesn’t display e-5. If the situation happens, just press “stop” and “evacuate” again.  [07/2021]

1.Login

• user: guest

• password: guest

2.venting

• “stop”

• “vent”

3.pre-clean

• open “load lock”

• load dummy wafer

• “stop”

• “evacuate”

  • Pirani guage will be decreased.

  • If the Penning guage doesn’t display e-5, even though turbo pump is working well, then press “stop” and “evacuate” again.

• “process”

• “recipes”

• “load”

• “O2 chamber clean”

• edit the process step to 60 min or 30 min

• when the process is done, yellow massage comes up and then press “accept”.

4.venting

• “stop”

• “vent”

5.sample preparation

• use Fomblin oil or tape to solidify sampe wafer at the center of dummy wafer.

6.sample loading

• “stop”

• “evacuate”

7.recipe running

• “process”

• “recipes”

• “load”

• “run”

• when the process (recipe) is done, the yellow message comes up and then press “accept”.

8.sample unloading

• “stop”

• “vent”

• take your sample out of the Load Lock.

• If you use Fomblin oil to combine your sample and dummy wafer, you need to use acetone to separate them.

• after taking outside your sample, “stop”

• “evacuate”

you are good to leave :)