DSE

1. Login

2. O2 clean dummy wafer

   • “vent”

   • open the load lock when the display shows “atmosphere”

   • load dummy wafer

   • Align major bar of the wafer with the line on the loading bar

   • close the load lock. Need to take the device.

   • load and run (“start job”) the O2 clean recipe.

3. dummy wafer unloading

   • unload the dummy wafer when the O2 clean completed.

   • The display should show “atmosphere”, because we select the function “vent after job”.

4. sample loading

   • load your wafer sample onto the wafer loading bar.

   • align major flat of your wafer with the line on the loading bar.

   • close the load bar.

5. Recipe check

   • “editors”->”seq editor”->”loop editor”

   • check the if the “loop” works. If not, change the appropriate loops.

6. “start job”

7. sample unloading

   • when the recipe is run off, the systems automatically vents. So, if we see the “atmosphere” shows, we may unload our wafer.

you can leave :)