MRL Furnace

Tool initializing

 - Login the tool

 - Double-Click the "Sentinel B" icon in the left bottom

 - Click the "File" tab and Select the "Log In" in the Palette window

 - Sentinel User ID : operator, Sentinel Password : guest1

 - Click the "Zone/Tool" tab and Select "C4" and Select "Gate_OX" or "Field_OX"

 - Click the "Tool Status" icon

 - Click the "Detail" button to check 'Run Number' and Compare it with log book

 - Click the "File" tab in "VTR Status" window and Select the "Exit"

 - Leave "Tool Status" window open

 - Click the "Run Tool" icon in the Palette window

 - Select the "Recipe" you want and Check the Tool you want

 - Click the "Run Minispec" button and "Run Tool Login" window will pop up

 - User Id : operator and Click the "OK" button

 - "Operator Step Time Entry" window will show up

 - Enter the operation time and Click the "OK" button

 - "Information" window will show up and Click the "OK" button

 - Once "Download Successful" shows up, then Click the "OK" button

 - Click the "File" tab in the "Run Tool" window and Select the "Exit"

 - Click "Control" button in the "Tool Status" window

 - Control Panel will show up and Select "Start" button

 - Check if "Process State" is "Hold" in the Tool Status window

Sample loading

 - Wear "Insulated glove" and Open the furnace lid

 - Place the elephant to the furnace entrance

 - Bring the wafer loading stick and Insert it through the hole onto the elephant

 - Load the wafer holder into the furnace until a thumb touches the elephant

   * During loading process, Uphold elephant to remove any leveled area with the furnace entry

 - Once loading is done, Wear "Insulated glove" and Close the furnace lid

   * Do not close the lid tightly

   * Make sure the exhaust tube towards exhaust hole in the furnace

 - Press the "Hold" button in the "Control Panel"

 - Check if the "Process State" is running and the "Step Name" is "ramp"

 - Hide your "Control Panel" window to avoid someone ruin my process

 - Place your stuff onto the deck to let others know I am using the tool

Sample unloading

- Wear "Insulated glove" and Open the furnace lid

 - Place the elephant to the furnace entrance

 - Bring the wafer loading stick and Insert it through the hole onto the elephant

 - Unload the wafer holder from the furnace

   * During Unloading process, Uphold elephant to remove any leveled area with the furnace entry

 - Once unloading is done, Wear "Insulated glove" and Close the furnace lid

   * Do not close the lid tightly

   * Make sure the exhaust tube towards exhaust hole in the furnace

 - Leave the elephant onto the deck and Cool down for 15min

 - Logoff the tool

Finalizing

 - Put three of clean wipers onto the desk in front of the H16 Acid hood

 - Bring the elephant onto the desk

   * Uphold the elephant carefully

 - Pull the glass wafer holder out from the elephant with a cleanroom wiper 

 - Unoad your wafers with Teflon tweezer in the H16 hood

 - Put the glass wafer holder into the elephant with a cleanroon wiper

 - Place the elephant onto deck of the furnace

You can leave now :)

when the tool fails process ...

If the step name is changed to "AnalogFLT" - > check O2 valve

Click the "Abort" button on control panel, then Step# is changed to 13.

Click the "Hold" button on control panel to make Process state "Idle"