CMUTs Parametric Array

Step 1 Al2O3 deposition

dummy wafer 1

blackbox No.25

SOI wafer

blackbox No.23

After exposure, there are some debris, which is from omnicoat layer. 

develop

After removing Su8 photoresist, we can easily see the color of omnicoat is like green. 

omnicoat etch

After removing omnicoat layer, Al2O3 in the hole is exposured.