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xiaoyuniu
Microfabrication
Adding
ALD Banerjee
Al2O3 one side deposition with carrier wafer and clamps
Al2O3 one side deposit with tap
MRL Furnace
Patterning
MA8 Aligner
SU8
SU8 various recipes
SU8 lift-off
omnicoat
AZ5214
Reducing
Spin Rinse Dryer
Oxford 100 ICP RIE
Al2O3 dry etch
DSE
Oxford 80 RIE Etcher
Packaging
ADT 7100 Dicing Saw
dicing tap damage Al2O3 coating for DSE
Skills
Modelling
Projects
CMUTs Parametric Array
Geophotonics
HF Vapor Etch
life
vehicles
xiaoyuniu
Microfabrication
Adding
ALD Banerjee
Al2O3 one side deposition with carrier wafer and clamps
Al2O3 one side deposit with tap
MRL Furnace
Patterning
MA8 Aligner
SU8
SU8 various recipes
SU8 lift-off
omnicoat
AZ5214
Reducing
Spin Rinse Dryer
Oxford 100 ICP RIE
Al2O3 dry etch
DSE
Oxford 80 RIE Etcher
Packaging
ADT 7100 Dicing Saw
dicing tap damage Al2O3 coating for DSE
Skills
Modelling
Projects
CMUTs Parametric Array
Geophotonics
HF Vapor Etch
life
vehicles
More
Microfabrication
Adding
ALD Banerjee
Al2O3 one side deposition with carrier wafer and clamps
Al2O3 one side deposit with tap
MRL Furnace
Patterning
MA8 Aligner
SU8
SU8 various recipes
SU8 lift-off
omnicoat
AZ5214
Reducing
Spin Rinse Dryer
Oxford 100 ICP RIE
Al2O3 dry etch
DSE
Oxford 80 RIE Etcher
Packaging
ADT 7100 Dicing Saw
dicing tap damage Al2O3 coating for DSE
Skills
Modelling
Projects
CMUTs Parametric Array
Geophotonics
HF Vapor Etch
life
vehicles
Spin Rinse Dryer
Currently, the SRD tool is set at recipe 6. The recipe 6 will take about 210 seconds runing.Â
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